专利名称：DEVICE AND METHOD FOR MATERIAL
PROCESSING BY MEANS OF LASERRADIATION
发明人：Mark Bischoff,Dirk Muhlhoff,Gregor
Stobrawa
申请号：US11549478申请日：20061013
公开号：US20080065052A1公开日：20080313
专利附图：
摘要：A device for material processing by laser radiation, including a source of laser
radiation emitting pulsed laser radiation for interaction with the material, optics focusingthe pulsed processing laser radiation to a center of interaction in the material, and ascanning unit shifting the positions of the center of interaction within the material. Eachprocessing laser pulse interacting with the material in a zone surrounding the center ofinteraction assigned to the laser pulse so that material is separated in the zones ofinteraction. A control unit controls the scanning unit and the source of laser radiationsuch that a cut surface is produced in the material by sequential arrangement of zones ofinteraction. The control unit controls the source of laser radiation and the scanning unitsuch that adjacent centers of interaction are located at a spatial distance a ≦10 μm fromeach other.
申请人：Mark Bischoff,Dirk Muhlhoff,Gregor Stobrawa
地址：Bad Berka DE,Kunitz DE,Jena DE
国籍：DE,DE,DE
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