专利名称：CONNECTION DEVICE发明人：Takahiro SHIRAI申请号：US12396674申请日：20090303
公开号：US20090224179A1公开日：20090910
专利附图：
摘要：There is provided a connection device for connecting a first depressurizationvessel to a second depressurization vessel. The connection device includes acommunication hole comprising a first opening which is connected to the firstdepressurization vessel, and a second opening which is connected to the second
depressurization vessel, the first opening and the second opening being, respectively, atopposite ends of the communication hole such that extreme ultraviolet radiation passesin a radiation direction from the first opening to the second opening; a gas inlet throughwhich a gas flows into the communication hole in a direction perpendicular to the
radiation direction of the extreme ultraviolet radiation; and a gas outlet which is opposedto the gas inlet such that the gas passes out the gas outlet.
申请人：Takahiro SHIRAI
地址：Gotenba-shi JP
国籍：JP
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