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Method for forming conductive layer and substrate

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专利名称:Method for forming conductive layer and

substrate having the same, and method formanufacturing semiconductor device

发明人:Tomoyuki Aoki,Takuya Tsurume,Daiki

Yamada

申请号:US11902799申请日:20070925

公开号:US20080096366A1公开日:20080424

专利附图:

摘要:A separation layer is formed over a substrate having a depressed portion, using

a silane coupling agent; a conductive layer and an insulating layer that covers theconductive layer are formed in the depressed portion over the separation layer; and asticky member is attached to the insulating layer, then the conductive layer and theinsulating layer are separated from the substrate. Alternatively, after these steps, aflexible substrate is attached to the conductive layer and the insulating layer.

申请人:Tomoyuki Aoki,Takuya Tsurume,Daiki Yamada

地址:Tochigi JP,Tochigi JP,Tochigi JP

国籍:JP,JP,JP

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