Inspection device

专利名称：Inspection device发明人：河西 繁,小林 将人申请号：JP2018038843申请日：20180305公开号：JP2019153717A公开日：20190912

专利附图：

摘要：High cost of an electronic device is suppressed. A prober as an inspectionapparatus inspects an electronic device by bringing a contact terminal into electricalcontact with the electronic device provided on the wafer. The prober has a coolantpassage 32a through which a light transmissive coolant flows, and on which a wafer is

placed, and a placement table 30 on which the opposite side of the wafer is formed by alight transmissive member. And a light irradiation mechanism 40 having a plurality of LEDs41 directed to the wafer W and facing the surface opposite to the mounting side of thewafer W in the mounting table 30, heat absorption by the refrigerant, and light from theLEDs 41 And a controller that controls the temperature of the electronic device to beinspected and controls the light output from the LED 41 based on at least the measuredtemperature of the electronic device to be inspected. The heat absorption by therefrigerant is controlled based on the light output of the LED. [Selection] Figure 4

申请人：東京エレクトロン株式会社

地址：東京都港区赤坂五丁目３番１号

国籍：JP

代理人：金本 哲男,萩原 康司,扇田 尚紀

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