专利名称：Particle beam system with a device for
reducing the energy width of a particlebeam
发明人：Jurgen Frosien申请号：US09400929申请日：19990922公开号：US0621B1公开日：20021203
专利附图：
摘要：A device for reducing the energy width of a particle beam with a 1and a 2Wienfilter for dispersing the particle beam depending on the energy of the particles, and an
aperture for selecting the particles within a certain reduced energy width. The device hasthe same functionality as one single Wien filter having the source of the particle beam atits center. Another aspect is a particle beam system with such a device for reducing theenergy width of the particle beam.
申请人：ADVANTEST CORP.
代理机构：Muramatsu & Associates
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