Method of manufacture of a thermally actuated slot

专利名称：Method of manufacture of a thermally

actuated slotted chamber wall ink jet printer

发明人：Kia Silverbrook申请号：US09112817申请日：19980710公开号：US06245246B1公开日：20010612

专利附图：

摘要：A method of manufacturing a thermally actuated slotted chamber wall ink jetprint head is disclosed wherein an array of nozzles are formed on a substrate utilisingplanar monolithic deposition, lithographic and etching processes. Multiple ink jet heads

are preferably formed simultaneously on a single planar substrate. The substrate can bea silicon wafer. The print heads are preferably formed utilising standard vlsi/ulsiprocessing. Integrated drive electronics are preferably formed on the same substrate.The integrated drive electronics can comprise a CMOS process. Ink can be ejected fromthe substrate substantially normal to the substrate.

申请人：SILVERBROOK RESEARCH PTY LTD

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