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Method of manufacturing transistors by means of io

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专利名称:Method of manufacturing transistors by

means of ion implantation

发明人:Michel de Brebisson,Maurice Bonis申请号:US05/767570申请日:19770210公开号:US04106954A公开日:19780815

摘要:A method of manufacturing transistors by means of ion implantation is

characterized by the implantation of a uniform extrinsic base zone, by providinbg a maskhaving at least two windows, and by the implantation of the emitter zone and then of theintrinsic active base zone via a first window, after which the implanted zones are annealed.

申请人:U.S. PHILIPS CORPORATION

代理人:Frank R. Trifari,Steven R. Biren

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