VAO PRODUCTIVITY SUITE

专利名称：VAO PRODUCTIVITY SUITE

发明人：SHIEH, Karl,COOKSON, Michael, A .,RILEY,

Norma, B .,WRIGHT, Donald, Rex,FATULA,Joseph, John

申请号：EP09713341.7申请日：20090220公开号：EP2248099B1公开日：20190410

摘要：A semiconductor fabrication facility (fab) configuration module is defined tovirtually model physical systems and attributes of a fab. A data acquisition module isdefined to interface with the physical systems of the fab and gather operational datafrom the physical systems. A visualizer module is defined to collect and aggregate theoperational data gathered from the physical systems. The visualizer module is furtherdefined to process the operational data into a format suitable for visual rendering. Theprocessed operational data is displayed within a visual context of the fab in a graphicaluser interface controlled by the visualizer module. An analyzer module is defined toanalyze data collected by the visualizer module and to resolve queries regarding fabperformance. An optimizer module is defined to control systems within the fab inresponse to data collected by the visualizer module, data generated by the analyzermodule, or a combination thereof.

代理机构：Zimmermann, Tankred Klaus

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