专利名称:Method for the manufacture of optical
components, and optical component
发明人:Helmut Sautter,Jörg Blechschmidt,Rainer
Schink,J{umlaut over (u)}rgen Graf,PeterLoeffler
申请号:US09117597申请日:19981030公开号:US06178281B1公开日:20010123
专利附图:
摘要:A method for the manufacture of optical components, at least one three-
dimensional optical waveguide structure being produced in a light-sensitive substrate bylocally subjecting the substrate to an exposure so that a difference in refractive indexbetween the substrate and the at least one optical waveguide structure is created.Provision is made for an exposure to occur at least twice, at different angles of incidencefor the light perpendicular to a light wave propagation direction of the optical waveguidestructure; the substrate surrounding what will later be the optical waveguide structurethereby experiences a diminution in refractive index, the optical waveguide structurebeing defined using a mask.
申请人:ROBERT BOSCH GMBH
代理机构:Kenyon & Kenyon
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